Heat transfer fluids production methodology

The AMEE category at business/processes/production/electronics/heattransferfluids/production provides a methodology for calculating the emissions associated with the use of heat transfer fluids during semiconductor manufacturing. Such emissions arise from evaporative losses during use. This methodology represents the Tier 1 approach described by the IPCC Guidelines for National Greenhouse Gas Inventories (NGGIP).

The methodology is based on a default emissions factor which represents the aggregate emissions per unit of silicon consumed. This factor is derived from a weighted average across all liquid fluorinated compounds typically used, expressed in terms of a C6F14. Emissions are calculated from the quantity of semiconductor substrate produced.

How to use this category

Selecting an emissions scenario

To use this category, simply create a profile item - there are no alternative drill choices.

Specifying activity data

Next, the user must specify the annual manufacturing design capacity of substrate processes, and the annual capacity utilisation using the capacity and fractionCapacityUtilised profile item values.

Results and calculation

The quantity returned represents the emissions assocaited with the specified quantities. Two quantities are returned, as follows:

  • C6F14: C6F14 emissions
  • CO2e: CO2e emissions (C6F14 emissions converted using the appropriate global warming potential)

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